| 发明名称 |
Method for simultaneous separation of several discs of brittle, hard workpiece; involves rotating workpiece and using wire saw |
| 摘要 |
The method involves guiding the workpiece through a wire frame of a wire saw by a relative movement of the workpiece and the wire frame, with the translative movement directed vertically to the longitudinal axis of the workpiece. When the disc is separated, the workpiece is rotated about its longitudinal axis. During rotation the peripheral surface is not in contact with any support. The angle of rotation is between 0 deg and 360 deg . Preferably, the direction of rotation is periodically reversed. An Independent claim is included for a wire saw.
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| 申请公布号 |
DE19851070(A1) |
申请公布日期 |
2000.05.18 |
| 申请号 |
DE19981051070 |
申请日期 |
1998.11.05 |
| 申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG;WACKER-CHEMIE GMBH |
发明人 |
GREIM, JOCHEN;KOELKER, HELMUT;ANDRAE, CHRISTIAN;EGGLHUBER, KARL;LUNDT, HOLGER;RIPPER, BERT |
| 分类号 |
B24B27/06;B23D57/00;B28D5/00;B28D5/04;(IPC1-7):B23D57/00;B28D1/02;H01L21/304 |
主分类号 |
B24B27/06 |
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