| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for testing semiconductor elements capable of performing tests in a minimum amount of time by monitoring the temperature of a semiconductor element to be tested and changing the interval of electric power repeatedly impressed on the element according to the temperature T of the element. SOLUTION: A temperature monitoring circuit 2 is a circuit to monitor the temperature of a semiconductor element 1 to be tested, and the temperature data monitored by the temperature monitoring circuit 2 is transmitted to a determining means 3. The determining means 3 halts the test until the monitored temperature of the element 1 reaches a set temperature and transmits a signal to renew the test to an electric power impressing circuit 4 at the time it reaches the set temperature. The electric power impressing circuit 4 receives the signal to renew the test and impresses set electric power on the element 1 again.
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