| 摘要 |
PROBLEM TO BE SOLVED: To obtain a rotational angular speed sensor having a simple structure suitable for mass production and operable stably even under a high driving voltage by arranging drive electrodes and detection electrodes while separating into a drive electrode group and a detection electrode group when they are arranged side by side. SOLUTION: The drive electrode group 21 and detection electrode group 22 are fixed electrodes meshing comb-shaped electrodes 11 and 12 provided on an oscillator 50 and these electrodes are arranged while keeping an interval mutually so that they do not touch each other. The oscillator 50 is supported resiliently while keeping a constant distance from a substrate by supporting means 41-44 and moves in x-axis and y-axis directions. When an AC voltage is applied between the drive electrode group 21 and the meshing electrode 11, attraction takes place between both electrodes to oscillate the oscillator 50. In case of the detection electrode group 22 and the meshing electrode 12, when an angular speed is applied about z-axis, i.e., an axis perpendicular to the substrate, in a state where the oscillator 50 is oscillated in the direction of x-axis, Coriolis force Fc acts in the direction of y-axis and the oscillator 50 inches in the direction of y-axis. |
