DEVICE FOR MEASURING THICKNESS PROFILE OF MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a device for obtaining thickness profile of a moving material having at least two optical interfaces. SOLUTION: A conveyor conveys a long moving material keeping a specified flatness so as to pass through a measurement region Z. A dent track 60 placed in a channel 52 gives a noncontact area in the measurement region. An interferometer device condenses a part of a light beam reflected from an optical boundary of a moving long material and produces an interference signal indicating the condensed light. Then, an analyzer analyzes the interference signal to obtain the thickness profile of a material in the first direction.