| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspecting method for finding lowering of the sensing ability of a pressure sensitive sensor, and nonconforming supply of pressurized air in an early stage. SOLUTION: An article to be inspected W is supplied and put between the upper chamber 1 and the lower chamber 2 of a leak inspecting machine, and in that state minute-pressure checking air is supplied directly to this is measured by a pressure sensing sensor 10, and whether the pressure sensing sensor is normal is judged. Next, pressurized air is supplied to one enclosed chamber 5, and a pressure in the other enclosed chamber 4 is measured by the pressure sensing sensor 10. Since whether there is an air leak in the article to be inspected is inspected, after confirming by inspection, for each article to be inspected, that the function of the pressure sensing sensor is normal, it becomes possible to prevent a detection error caused by functional deterioration of the pressure sensitive sensor immediately. Besides, a pressure sensor 21 is put in one enclosed chamber 5 to which the pressurized air is supplied, and whether or not the pressure of the pressurized air is normal is also inspected by the above-mentioned pressure sensor, while the pressurized air is being supplied to the enclosed chamber 5.
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