| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of automatically and correctly taking an image of an objective board without generating artitaets in a provided digital image even in the case of taking the image of any objective board with any magnification, determining the position of a defective part, and analyzing the feature quantity of the defective part and the nature thereof in relation to the defective part, and to provide a defective part analysis method using the scanning electron microscope. SOLUTION: This scanning electron microscope is provided with: a switch control part 108 to control a scanning means 104 by at least switching it so as to provide in a switched fashion, a low-magnification digital image signal based on a wide image-taking visual field and a high-magnification digital image signal based on a narrow image-taking visual field from an A/D converting part 116; and beam spot diameter control parts 203, 106, 110, 105, 109, 101 to control the spot diameter of an electron beam on the surface of an objective board by switching it when the control is performed by switching with the switching control part. This defective part analysis method employs the scanning electron microscope.</p> |
