| 摘要 |
PROBLEM TO BE SOLVED: To enable an aligner to be readily corrected and in a short time for magnification errors. SOLUTION: Index marks 15 and forming beams 13 are relatively scanned, and the overlapping area of the index marks 15 and the forming beams 13 is detected. The marks 15 and beams 13 are kept in a form such that they are not changed in overlapping area, when parameters such as magnification and the like of a transfer optical system are in a preferable state or they are changed in overlapping area, when the parameters are out of a preferable state. When a target parameter is controlled so as not to let the overlapping area change, the parameter can be adjusted real time in a transfer exposure process, without complicated calculations.
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