UPPER ELECTRODE HAVING DOUBLE SEALING RING

摘要

PURPOSE: An upper electrode having a double sealing ring is to minimize a leakage of process recipe after cleaning an etcher and thereby shorten the back-up time for compensating for the leakage. CONSTITUTION: An upper electrode is established in a reactor chamber of an etch equipment.The upper electrode comprises: an inner sealing ring(120) encircling outside a upper electrode having a hole(125) and having a first radius; and an outer sealing ring(130) encircling the inner sealing ring and having a second radius greater than the first radius. The upper electrode, the inner sealing ring, and the outer sealing ring are arranged on the concentric circle. A fixing pin(115) is also provided to fix the outer sealing ring outwardly. The second radius of the outer sealing ring is large by 30 to 40 percent compared with the first radius of the inner sealing ring.