| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic breakdown testing device, which can eliminate the need for man-hours for obtaining test samples, and in addition, can prevent the mechanical breakage of the test samples by reducing errors due to manual operations during the course of electrostatic breakdown tests, reducing various kinds of programming man-hours, when computer is used for control, making the device compact, and so on. SOLUTION: This electrostatic breakdown testing device is provided with a wafer stage 12 for placing a semiconductor wafer 13 and a prober, which is formed by connecting a probe head 14 to one end (discharging terminal 21) of a coaxial cable 15 and a DC power source 17 to the other end (charging terminal 2) of the cable 15 via a switch 16. The testing device is constituted to charge the coaxial cable 15 by means of the DC power source 17, by closing the switch 16 when the wafer 13 on the stage 12 is separated from the probe head 14 and to open the switch 16, when the probe head 14 and the stage 12 approach thereafter. When the two needles 23 of the probe head 14 come into contact with the element on the wafer 13, the device is so constituted that the cable 15 to discharge through the needles 23.</p> |
