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发明名称
Plasmabehandlungsverfahren und -vorrichtung
摘要
申请公布号
DE69515626(D1)
申请公布日期
2000.04.20
申请号
DE19956015626
申请日期
1995.12.28
申请人
SUMITOMO HEAVY INDUSTRIES, LTD.
发明人
SAKEMI, TOSHIYUKI;TANAKA, MASARU
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
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地址
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