SCAVENGER BOX OF SEMICONDUCTOR DIFFUSING DEVICE

摘要

PURPOSE: A scavenger box of a semiconductor diffusion apparatus is provided to emit a residual gas leaked at a diffusion process forcibly. CONSTITUTION: A scavenger box of a semiconductor diffusion apparatus comprises a gas detecting sensor(54), an exhaust duct(56), and a control part(60). The gas detecting sensor(54) is installed in a scavenger box(30), and senses a residual gas in order to exhaust the residual gas. The exhaust duct(56) mutually communicates with an exhaust part(58) so as to exhaust a residual gas forcibly. The exhaust part(58) is installed at a part of the exhaust duct(56). The control part(60) makes the residual gas exhausted via the exhaust duct by driving the exhaust part(58) according to a sense signal from the gas detecting sensor.