| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying arm which can be miniaturized and is superior in control characteristics. SOLUTION: One end part of third and fourth arms 110, 114 of a carrying arm 100 is connected to first and second rotating shafts 104, 108 via first and second arms 102, 106, respectively. The other end part is connected to a seventh arm 132 through fifth and sixth arms 120, 124, respectively. The third and fourth arms 110 are bent into an L-shape by first and second intermediate rotating parts 118a, 118b, respectively and rotatably connected with a third joint 118. A seventh arm 132 is arranged in a line segment direction which divides an angle between fifth and sixth arms 120, 124 approximately into two equal parts. When first and second rotating shafts 104, 106 are rotated by the same angle in the reverse directions respectively, first to sixth arms 102, 106, 110, 114, 124 expand and contract, and a wafer carrying part 132a formed in a seventh arm 132 moves horizontally and in a linear direction. |
