| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow mapping for plural kinds of cassettes different in their sizes and shapes, in a fluorescence X-ray analyzer using wafers stored in the cassettes as samples. SOLUTION: This analyzer is provided with a control means 28 in which a kind of a conveyed-in cassette 6 is input, a cassette table 14 mounted with the cassette 6 is set to a prescribed direction in response to the kind by a rotating means 19 to be lifted by a lifting means 20, and in which a stored height for the wafer 1 in the cassette 6 is found based on a detected signal from a detection means 21 for detecting the cassette 6 or the wafer 1 in a prescribed detecting height and detecting direction.</p> |
