| 摘要 |
PROBLEM TO BE SOLVED: To shorten time for temperature adjustment of an aligner, restrain deterioration in the operation rate of equipment, lower vibration generated from temperature adjusting equipment, reduce errors and stoppages of the equipment at performing fine working by the aligner, and increase the operation rate of the equipment, by changing the ability of the temperature adjusting equipment in matching with heat generating state of the aligner and operating the equipment without using wasteful power. SOLUTION: In semiconductor manufacturing equipment having a chamber 1 provided with an air conditioning means, the air conditioning means has a plurality of compressors 4-7 or a heat exchanger and a means 12 selecting the compressors or the heat exchanger, which are to be operated in accordance with operation of the equipment. There are cases in which this equipment may have means 8-11 which synchronously drive a plurality of the compressors, such that vibration generated from the compressors is reduced by mutual interference.
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