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经营范围
发明名称
Exposure apparatus
摘要
申请公布号
EP0420700(B1)
申请公布日期
2000.04.05
申请号
EP19900310709
申请日期
1990.09.28
申请人
CANON KABUSHIKI KAISHA
发明人
OZAWA, KUNITAKA;UZAWA, SHUNICHI;OHTA, HIROSHI;MORI, MAKIKO;NOSE, NORIYUKI
分类号
G03F7/20;G03F9/00;G05D3/12;H01L21/027;H01L21/30;(IPC1-7):G03F9/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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