DUSTPROOF DEVICE OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: An apparatus for preventing vibration in a semiconductor manufacturing equipment is provided to prevent pollution of surrounding by draining easily water gathered on a base plate. CONSTITUTION: A rim(32) of a predetermined height is formed at an upper side of an edge of a bottom face. A plurality of support portion(34) is installed parallel to an upper side of the rim(32). A base plate(36) is formed to the predetermined height of the rim(32) between the support portions(34) and the bottom face. An exhaust tube(38) penetrating the rim(32) is installed at a predetermined location of the base plate(36). An exhaust hole(40) is connected with the exhaust tube(38). Inner diameters of the exhaust tube(38) and the exhaust hole(40) are 30 to 40mm. A draining member(42) is formed to induce water to the exhaust hole(40).