发明名称 |
Device for vibration isolation |
摘要 |
A device for the vibration isolation with level control of an object with respect to a base, having a pneumatic spring and a completely mechanically decoupled control loop comprising a position sensor which operates in a contact-free manner, an electronic controller and an electrically controllable flow valve allowing a contact-free level control with adjustable control parameters.
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申请公布号 |
US6042079(A) |
申请公布日期 |
2000.03.28 |
申请号 |
US19970896834 |
申请日期 |
1997.07.18 |
申请人 |
MIKROSKOPIE UND SYSTEME GMBH |
发明人 |
HOGENKAMP, DETLEF |
分类号 |
G12B9/08;B23Q15/22;F16F9/02;F16F9/50;F16F15/02;F16F15/027;G05D19/02;(IPC1-7):F16M13/00 |
主分类号 |
G12B9/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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