DISTRIBUTED CONTROL SYSTEM FOR A SEMICONDUCTOR WAFER PROCESSING MACHINE
摘要
<p>A distributed control system for a semiconductor wafer processing machine includes a master control module and a plurality of application control modules. Each of the application control modules and the master control module are capable of autonomous, independent operation. The master control module regulates the operation of the application control modules, and the application control modules govern a number of sub-procedures carried out by the wafer processing machine. The sub-procedures may be governed by respective processing recipes that are downloaded from the master control module to the application control modules via a network link architecture.</p>
申请公布号
WO9964940(A9)
申请公布日期
2000.03.23
申请号
WO1999US13137
申请日期
1999.06.10
申请人
SPEEDFAM-IPEC CORP.;ALLEN, ROBERT, F.;JORDAN, RICARDO, T.