摘要 |
PROBLEM TO BE SOLVED: To provide a target for X-ray generation and an X-ray tube using it, capable of generating X-rays of minute focused radius, suppressing lowering of impact resistance, and improving cooling effect at the same time. SOLUTION: This target is provided to a copper target carrier 16, and it receives electron beams radiated from a cathode to emit X-rays. The target is provided with a carbon layer 19 having thermal conductivity larger than that of copper, a rhenium layer 20 on the carbon layer 19, and a tungsten thin film 21 on the rhenium layer 20 for receiving the electron beam to emit X-rays. Here, the electron beam is converted into X-rays in the thin film 21, and the X-rays having a small focused radius are emitted from the target. Moreover, the heat generated by the electron beams absorbed into the carbon layer 19 is rapidly conducted to the supporting body 16. Furthermore, the rhenium layer 20 prevents the formation of tungsten carbide.
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