| 摘要 |
Disc cover (17) for chamber for printing integrated circuit wafers, comprises a centering part (18) engaging the chamber opening, and an annular surface (19) with sealing ring (9) and interior annular groove (20). The disc cover (17), removable and transparent, substitutes the articulated lid of the print chamber (3). The wall of chamber presents an annular surface of support (8) around the chamber opening (4) and contains at least one channel (21) traversing the support surface. The disc (17) comprises a centering part (18) engaging the chamber opening and surrounded by an annular surface (19) which rests on the support surface (8) with the intermediary of a sealing ring (9). The annular surface is with an annular groove (20) which puts in communication the print chamber (3) and the channel (21) on the side interior to the sealing ring (9). The centering part (18) comprises a cylindric part and at least three projections (22) in the vicinity of the chamber wall. The periphery of disc cover is with a spur which comes to support on a sensor at periphery of the chamber opening for the detection of contact to indicate placement. The disc cover is with handles (23). The print chamber (3) is in a controlled communication with an adjoining transfer chamber. |
