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法人/股东/高管

发明名称
摘要
申请公布号	JP3020621(B2)	申请公布日期	2000.03.15
申请号	JP19910017462	申请日期	1991.02.08
申请人		发明人
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/316;(IPC1-7):H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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