发明名称 |
Microroughness-blind optical scattering instrument |
摘要 |
A microroughness-blind optical scanner focuses p-polarized light onto the surface of a sample. Scattered light is collected through independently rotatable polarizers by one or more collection systems uniformly distributed over a hemispherical shell centered over the sample. The polarizer associated with each collection system is rotated to cancel the corresponding Jones vector thereby preventing detection of microroughness-scattered light, yielding higher sensitivity to particulate defects. The sample is supported on a positioning system permitting the beam to be scanned over the sample surface of interest.
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申请公布号 |
US6034776(A) |
申请公布日期 |
2000.03.07 |
申请号 |
US19980058182 |
申请日期 |
1998.04.10 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCE |
发明人 |
GERMER, THOMAS A.;ASMAIL, CLARA C. |
分类号 |
G01N21/94;(IPC1-7):G01N21/01;G01N21/88 |
主分类号 |
G01N21/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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