| 摘要 |
PROBLEM TO BE SOLVED: To prevent a position deviation of a conveyed object due to deflection and torsion, and provide a link device of light weight, by reforming a route transmitting a deflection load and torsion load. SOLUTION: The other end side 1b of a main arm 1 of a first parallel link 14A and one end side 3a of a main arm 3 of a second parallel link 14B are connected coaxial by a connecting shaft 9 through a float bearing 6. In this way, a deflection load and torsion load are directly transmitted from the main arm 3 to the main arm 1, a position deviation of a wafer 13 is prevented, also weight of this link device can be lightened. |
