发明名称 |
Method for manufacturing a sensor |
摘要 |
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
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申请公布号 |
US6030850(A) |
申请公布日期 |
2000.02.29 |
申请号 |
US19980030414 |
申请日期 |
1998.02.25 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
KURLE, JUERGEN;FUNK, KARSTEN;LAERMER, FRANZ;OFFENBERG, MICHAEL;SCHILP, ANDREA |
分类号 |
G01L1/18;B81B3/00;B81C1/00;G01P15/08;G01P15/125;H01L29/84;(IPC1-7):G01L1/00;H01L21/461 |
主分类号 |
G01L1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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