| 摘要 |
A method of manufacturing a liquid crystal display device utilizing a substrate (#110) divided into display (#120) and non-display areas (#130). Within the display area of the substrate, a first layer is formed preferably including at least a switching element (#131) and output electrode (#180b). A second layer (#155) is formed on the first layer, preferably containing a material with an Si bonding structure, to act as a protection layer and to cover the display and non-display areas of the substrate. A photoresist (#160) is coated over the second layer, exposed to an ultraviolet light using a mask having a pattern for forming a contact hole (#137) at the display area of the substrate and an etching end point detection part (#500) at non-display area of the substrate, and developed. An enchant is injected an to react with portions of the protection layer, that are exposed through the pattern, to remove these exposed portions of the protection layer and resulting in the generation of a reproducible gas. The etching end point is automatically determined by detecting the amount of reproducing gas both in the display portion and non-display areas of the substrate. Finally, the non-display area of the substrate is cut out after manufacturing of the display is completed.
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