发明名称 FABRICATING METHOD OF LASER DIODE
摘要 PURPOSE: A fabricating method of a laser diode is provided to deposit a uniform reflection layer on an active region by preventing shadow effect. CONSTITUTION: The method comprises the steps of depositing laser diode chip bars fabricated with a shape of a wafer after completion of all process; depositing a reflection layer on both surfaces of the respective deposited laser diode chip bars using a sputtering method having a direction; alternatively inserting dummy chip bars having substrate-off of a predetermined angle between the deposited laser diode chip bars into a spacer to prevent the shadow effect; and removing the spacer after deposition of a high-reflection mirror facet coating layer and an anti-reflection mirror facet coating layer on both the sides thereof.
申请公布号 KR20000007377(A) 申请公布日期 2000.02.07
申请号 KR19980026668 申请日期 1998.07.02
申请人 LG ELECTRONICS INC. 发明人 JANG, YEONG HAK
分类号 H01S5/028;(IPC1-7):H01S3/18 主分类号 H01S5/028
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