摘要 |
PURPOSE: A fabricating method of a laser diode is provided to deposit a uniform reflection layer on an active region by preventing shadow effect. CONSTITUTION: The method comprises the steps of depositing laser diode chip bars fabricated with a shape of a wafer after completion of all process; depositing a reflection layer on both surfaces of the respective deposited laser diode chip bars using a sputtering method having a direction; alternatively inserting dummy chip bars having substrate-off of a predetermined angle between the deposited laser diode chip bars into a spacer to prevent the shadow effect; and removing the spacer after deposition of a high-reflection mirror facet coating layer and an anti-reflection mirror facet coating layer on both the sides thereof.
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