| 摘要 |
PROBLEM TO BE SOLVED: To obtain the articulated-carrying arm having the rigidity in compliance with the formation of the large-scale body to be processed such as LCD substrate. SOLUTION: This carrying unit 5 has an articulated carrying arm 11 which conveys a substrate 1 for LCD, and a driving mechanism which drives this carrying arm 11 and gives and takes the LCD substrate 1 through a load-locking chamber 12 between a processing chamber 2 and a carryer. In this carrying unit 5, the load-locking chamber 12 is provided in the carrying unit 5 so as to be connected to the processing chamber 2. Furthermore, a carrying arm 11 is provided in the load-locking chamber 12. At the same time, a direct driving mechanism 19 which moves the carrying arm 11 for the processing chamber 2 or the carrying facing the carrying arm 11 back and forth is provided in the load-locking chamber. |
