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发明名称
ION IMPLANT SYSTEM
摘要
申请公布号
KR100237830(B1)
申请公布日期
2000.02.01
申请号
KR19970006792
申请日期
1997.02.28
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
IM, BYEONG GI;SO, CHANG EOB
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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