WAVEGUIDE TYPE OPTICAL SWITCH AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To realize a method for producing a waveguide type optical switch which has a high dimensional precision and is small-sized and suitable for remote control and also which has a small insertion loss. SOLUTION: A working part 12e whose width is narrower than the depth of working and two working parts 11f and 15 on both sides of this narrow working part which have a width wider than the depth of working are subjected to anisotropic dry etching. When holes reaching a separation layer 2 are formed in working parts 11f and 15 having the wider width, anisotropic dry etching is stopped at the timing when a hole is not formed in the hole 12e of the narrow working part. Etching liquid is supplied to working parts 11f and 15 having the wider width, and a separation layer 2b under the narrow working part 12e is completely removed while partially leaving a separation layer 2a between a connection member 8 and a substrate 1. Then the hole 12e of the narrow working part is pierced by anisotropic dry etching, and the separation layer 2a under the connection member 8 is completely removed.