| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a new (meth)acrylate derivative useful in e.g. producing resins used as photoresist materials with excellent dry etching resistance, transparency, substrate adhesion, and resolution. SOLUTION: Thie new compound is shown by formula I (R1 and R2 are each H or methyl), e.g. 5-acryloyloxy-2,6-norbornanecarbolactone. The compound of formula I is obtained, for example, by reaction between 5-hydroxy-2,6- norbornanecarbolactone and acryloyl chloride in an inert organic solvent such as tetrahydrofuran in the presence of a base. Furthermore, it is preferable that this compound of formula I is either homopolymerized or copolymerized with another polymerizable compound to prepare e.g. a copolymer of formula II (R1 to R3 and R5 are each H or methyl; R4 is a group decomposable with an acid; R6 is H or a 1-12C hydrocarbon; (x), (y) and (z) are each 0 or 1, x+y+z=1) with a weight-average molecular weight of 2,000-200,000.</p> |
