ETCHING APPARATUS OF SEMICONDUCTOR DEVICES HAVING A BUBBLER

摘要

PURPOSE: An apparatus for etching semiconductor devices having a bubbler is provided to minimize a defective and stabilize a setting of the bubbler by further comprising an identification part. CONSTITUTION: The etching apparatus comprises a bubbler(10) for spraying a gas into an etching chamber and formed on upper part of the etching chamber; and an identification part(12) for identifying a reference of setting of the bubbler(10) and formed in the bubbler(10). A number of the identification part(12) are twelve and has a width of 5 millimeters spaced apart from each other.