发明名称 |
MANUFACTURE OF OPTICAL PICKUP |
摘要 |
PROBLEM TO BE SOLVED: To provide a process for manufacturing an optical pickup which high accurately and easily manufactures the openings of the optical pickup which executes writing and reading out of information to and from a recording medium by utilizing evanescent waves. SOLUTION: Island-shaped thermally oxidized films 101a are patterned as masking films over regions of a prescribed size in the positions of a substrate 100 where the microopenings to generate the evanescent waves on its surface are ought to be formed. An impurity is diffused to the substrate 100 patterned with the island-shaped thermally oxidized films 101a so as to progress to the regions below the island-shaped thermally oxidized films 101a at a prescribed depth and opene the regions to be formed as the microopenings under the island- shaped thermally oxidized films 101a and thereafter, the portions exclusive of the impurity diffused regions 103 are etched away from the rear surface side of the substrate 100. The microopenings to generate the evanescent wave are thus formed at the substrate 100. |
申请公布号 |
JP2000011438(A) |
申请公布日期 |
2000.01.14 |
申请号 |
JP19980192445 |
申请日期 |
1998.06.23 |
申请人 |
RICOH CO LTD;KANAGAWA ACAD OF SCI & TECHNOL |
发明人 |
TAKAHASHI JUNICHI;OTSU GENICHI;KOROGI MOTONOBU |
分类号 |
G11B7/135 |
主分类号 |
G11B7/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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