| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device which can carry out the sticking work of a polishing pad and the drilling work to the polishing pad, highly accurately, simply, and safely. SOLUTION: To the part of a lower surface plate 5 corresponding to the hole 2 of an upper surface plate 1, a cutting member 6 is provided through an energizing member 8. A guide member 9 which can load a polishing pad 12, as well as can movably support the cutting member 6, is provided to the lower surface plate 5 through energizing members 11 with spring contact smaller than the energizing force of the energizing member 8. By loading the polishing pad 12 to the guide member 9, and approaching the upper and the lower surface plates 1 and 5, the polishing pad 12 is pressed by the energizing members 11, and stuck to the upper surface plate 1 side through an adhesive 14. When the upper and the lower surface plates 1 and 5 are allowed to approach, the front end of the cutting member 6 abuts to the upper surface plate 1 through the polishing pad 12, the polishing pad 12 is held strongly between the cutting member 6 and the upper surface plate 1 by the energizing member 8, and the polishing pad 12 is cut in the form of the cutting member 6.</p> |
