| 摘要 |
PROBLEM TO BE SOLVED: To obtain a safe cleaning method with a solvent capable of effectively removing pollutant and having little solvent loss, no fear of fire in cleaning of electronic components, printed boards or the like. SOLUTION: This cleaning method for parts employs a washing system consisting of a washing vessel 1, a rinsing vessel 2 and a pollutant removing vessel 3 and objects are washed in the washing vessel filled with a hydrofluorocarbon, a hydrofluoroether or a mixture of the both (first solvent) and an organic solvent having a boiling point of >=50 deg.C higher than the first solvent (second solvent) and removed their pollutants, then, the second solvent attached to the object is removed in the rinsing vessel filled with the first solvent by rinsing and, concurrently, the resultant contents in the washing vessel and the rinsing vessel are continuously transferred to the pollutant removing vessel so as to remove pollutant components from the solvent in the pollutant removing vessel by insolubilization and the resultant cleaned solvent is returned to the washing vessel. The washing system consists of the above mentioned three vessels.
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