| 摘要 |
The invention concerns a method for controlling the production of an object controlled by a gas panel, which consists in performing an ellipsometric measurement on the object represented by its Mueller matrix; controlling, by means of a gas panel, the manufacture on the basis of the ellipsometric measurement. The invention is characterised in that it consists in determining beforehand certain parameters of the Mueller matrix, for characterising the manufacture, and only said parameters are extracted from the ellipsometric measurement during manufacture, said parameters being two different parameters of the ellipsometric angles psi and DELTA and trigonometric functions thereof. The invention also concerns an installation for manufacturing an object controlled by a gas panel comprising an ellipsometre for producing a measurement on the object which is represented by its Mueller matrix.
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