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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11345981(A)
申请公布日期
1999.12.14
申请号
JP19990139216
申请日期
1999.05.19
申请人
SEIKO EPSON CORP
发明人
NAKAZAWA YOSHIO
分类号
H01L27/04;H01L21/822;H01L27/12;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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