| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cassette rotational position adjusting mechanism, which is capable of adjusting the rotational position of a cassette, in such a manner that the surfaces of substrates accommodated in the cassette orient toward mutually opposite directions, and substrate transfer equipment provided with the adjusting mechanism at a low cost. SOLUTION: Although a turn table 62 can be turnably reciprocated in an angle range of 90 deg. by an air cylinder 75 for rotational driving delivery of a cassette C is mode possible in a state such that a rod 753 of the air cylinder 75 is stretched and a rod 753 is contracted. Through the operational control of the air cylinder 75, the rotational position of the cassette which is suitable for face-to-face arrangement and face-to-back arrangement is adjusted.</p> |
