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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11340424(A)
申请公布日期
1999.12.10
申请号
JP19980148172
申请日期
1998.05.28
申请人
NEC CORP
发明人
KATO OSAMU
分类号
H01L27/04;H01L21/265;H01L21/266;H01L21/822;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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