| 摘要 |
<p>The probe card suitable for inspection of multi-pin devices comprises a plurality of probe pins, each having a tip which comes into contact with one of electrical terminals of a semiconductor device, an elastic member causing the tip of each probe pin to spring back in the axial direction of the probe pin when the tip of the probe pin is pressed against the electrical terminal, a plurality of transfer lines for supplying and receiving signals to and from the probe pins when the probe pins are in contact with the terminals, and a substrate for holding the probe pins and the transfer lines. At least some of the plurality of probe pins may be arranged in a straight line on the probe card. The elastic member has a probe-pin shifting mechanism for moving the tip of each probe pin in a direction perpendicular to the axial direction of the probe pin a distance corresponding to the distance the probe pin moves in the vertical direction when the tip of the probe pin is pressed against the terminal. The probe-pin shifting mechanism may move the tip of each probe pin in a predetermined direction when the tip of the probe pin is pressed against the terminal. If at least some of the plurality of probe pins are aligned in a straight line on the probe card, the predetermined direction is perpendicular to both the axial direction of the probe pin and the straight line in which the probe pins are arranged. <IMAGE></p> |
