PIEZOELECTRIC ELEMENT, INK-JET RECORDING HEAD, AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element driven at a low voltage, by manufacturing a crystal body of piezoelectric ceramics whose crystal axis is positively tilted for improved electromechanical transfer at a low voltage. SOLUTION: The piezoelectric element comprises a piezoelectric body layer of perovskite crystal structure and upper and lower electrodes provided with the piezoelectric body layer in between. The crystal axis orientation in columnar crystal grain in (001) orientation of a piezoelectric body layer 41 (411-41n) is so set as to form a specified angle (5-20 deg.) with normal direction of a lower part electrode 32 surface. The piezoelectric element of this structure shows a piezoelectric characteristics similar to a conventional one at low voltage, while showing a piezoelectric characteristics higher than conventional one at a voltage above it. This is suitable for a piezoelectric element driven at low voltage.