MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT
摘要
An improvement over prior art voltage timing compensation circuits is achieved by incorporating a function generator to provide a more accurate non-linear compensation to pulse timing delay, which is typically a non-linear function of voltage. An improvement over prior art temperature timing compensation circuits is achieved by providing for actual temperature measurements to be made and used to drive the timing compensation circuitry (120) for a more accurate temperature timing compensation than provided by prior art temperature synthesis, while still using a relatively simple compensating circuit. In some embodiments, a timing compensation circuit combines both voltage and temperature timing compensation.
申请公布号
WO9956356(A1)
申请公布日期
1999.11.04
申请号
WO1999US04250
申请日期
1999.02.25
申请人
CYMER, INC.;NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.
发明人
NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.