CMP PAD CONDITIONING DISC AND CONDITIONER, MANUFACTURE OF DISC, AND REGENERATING METHOD AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a CMP pad conditioning disc and a conditioner that can improve polishing pad conditioning effect, and to provide methods of manufacturing, regenerating and cleaning this disc. SOLUTION: In this CMP pad conditioning disc 30, areas divided by polishing grain sizes are partitioned on the surface of a disc body 31 and formed by repeated execution of intersecting adhesive films in specified thickness on the disc body 31. The polishing grains are detached from the body 31 of the already used conditioning disc 30. As a method of cleaning the conditioning disc 30, the already used conditioning disc 30 is submerged in a hydrogen fluoride or BOE solution to eliminate a membranaceous by-product to clean the disc 30. The conditioning ability and service life of a polishing pad are therefore improved, and cost is reduced.