METHOD OF PURIFYING AIR IN CLEAN ROOM AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a desired removing effect of contaminants without installing a chemical filter and therefore to unnecessitate the stopping of a production line, and to lower the running cost. SOLUTION: The device for purifying air in a clean room has a fan 3 installed on the downstream side of a flow passage 2 for air discharged from the clean room 1. A scrubber 4 for purifying the air from the clean room 1 has a scrubber body 5 packed filled with pure water 6. Packing material 7 installed in the scrubber body 5 is constituted of a lot of plate materials whose sides and planes are formed like an almost corrugated shape and which are integrated. By contacting water with air fed to the clean room 1 or air in the clean room 1 to absorb contaminants contained in the air, the air in the clean room 1 is purified.