| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow a pixel electrode to be positively brought into contact with a drain electrode via the contact hole of an interlayer insulation which is made of transparent resin by treating the surface of a substrate containing the surface of the drain electrode of a lower part exposed to the contact hole for cleaning the surface of a contact part. SOLUTION: A TFT is formed, and a photosensitive acryl-family transparent resin is used for forming an insulating film 10 to eliminate a step part for planarization of a surface. Then, a contact hole 11 is formed so that one part of the surface of a drain electrode is exposed through exposure and development treatment. At this time, a foreign object that is in a granular shape or in a uniform thin film state remains as a residue on the surface of the opening part of the contact hole 11. In this case, for almost all the residues, an interlayer insulation 10 is used as a main constituent. After that, the entire surface including the contact hole 11 is removed of the residues by surface treating, thus a pixel electrode 13 is formed.</p> |
