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发明名称
DEPOSITED FILM FORMING APPARATUS AND ELECTRODE FOR USE IN IT
摘要
申请公布号
KR100222807(B1)
申请公布日期
1999.10.01
申请号
KR19950056931
申请日期
1995.12.26
申请人
CANON KABUSHIKI KAISHA
发明人
AOIKE, TATSUYUKI
分类号
G03G5/08;C23C16/44;C23C16/50;C23C16/511;H01J37/32;H01L21/205;(IPC1-7):C23C16/54
主分类号
G03G5/08
代理机构
代理人
主权项
地址
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