| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder for conveying a film substrate, which the film substrate can be easily attached to and detached from and by which a planar state of the film substrate can be surely maintained and to provide a films substrate in which deflection and wrinkle are hardly generated even if the film substrate is thermally expanded during its conveyance and process. SOLUTION: As the holder 1 for conveying the film substrate, locking pins 5 are erected on four corners of the inner side of a holder main body 2 formed in a rectangular shape while attaching hoes 21, 22, 23 and 24 are formed on four corners of the film substrate 10. The locking pins 5 are inserted into the attaching holes 21, 22, 23 and 24 and prevented from falling out by using washers 7 having a pawl 20 in its inner periphery. And a holder positioning pins 16 having the same axial center with the locking pins 5 and projecting in a direction opposite to the direction of the locking pins 5 are provided. One of the attaching holes of the film substrate 10 is specified to be the standard attaching hole 21 which is exactly engaged with the locking pin 5 and the attaching hole in the position diagonal to the standard attaching hole 21 is specified to be the large diameter attaching hole 22 and the residual two attaching holes are specified to be elliptically shaped attaching holes 23 and 24.
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