Hydraulic microactuator acting in millimeter and sub-millimetre range as part of liquid circuit

摘要

The actuators (13) have capacitor surfaces, between which an electrorheological (ER) liquid is located. The viscosity of the fluid can be changed by applying an electric voltage at the capacitor surfaces. The alteration of the viscosity at this place acts in conjunction with a pressure difference in the liquid circuit, to produce a local pressure drop in the circuit.