发明名称 FIXED BOARD FOR POLISHING DEVICE AND PASTING METHOD FOR POLISHING PAD
摘要 PROBLEM TO BE SOLVED: To allow a polishing pad to be easily pasted onto a surface plate and cut in a shot time even by an unskilled worker. SOLUTION: Protecting rings 5, 6 are mounted above the outer periphery and the inner periphery of a surface plate 1 having the surface, excluding a pad pasted face, covered with a protecting coat 2. At this time, the pad contact faces 50, 60 of the protecting rings 5, 6 are set to be flush with the pad pasted face 10. After a polishing pad 3 of a raw cloth sized larger than the surface plate 1 is pasted onto the pad pasted face 10 in such a state, the edge 40 of a cuter knife 4 is put in contact with the slopes 52, 62 of the protecting rinds 5, 6 to cut the polishing pad 3, so that the polishing pad 3 can be cut into a shape corresponding to the surface plate 1.
申请公布号 JPH11262855(A) 申请公布日期 1999.09.28
申请号 JP19980084918 申请日期 1998.03.16
申请人 SPEEDFAM CO LTD 发明人 HAKOMORI SHIYUNJI;ONISHI MASABUMI
分类号 B24B37/12;B24B37/20;B24B45/00;B24D7/16;B24D18/00 主分类号 B24B37/12
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