Crystallization of ceramic layers especially electronic ceramic thin films for integration with microelectronic and micromechanical devices e.g. for Fe-RAM production

摘要

A crystalline ceramic layer is produced by continuous UV irradiation of a ceramic layer on a substrate. An Independent claim is also included for an optical component, especially a ferroelectric memory, with a layer produced as described above. Preferred Features: The ceramic is a ferroelectric or dielectric perovskite, especially an ABO3 type perovskite (A = Ba, Sr, Ca or Pb; B = Ti or Zr) or an Aurillius phase selected from SrBi2Ta2O9 and SrBi2Nb2O9.