| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent attachment of a foreign matter to damage mirror-like finishing by integrally molding a bottom part of a space chamber provided by opening one end side of a body main body and a body side supply port opened on an outer surface of the body main body of a metal ion inflow preventive material to fluid in a communicating state in a body side supply passage. SOLUTION: A body side supply port 6 and a body side supply passage 7 are formed of a fluororesin by integrally molding a main body, and a floating sheet side supply passage 11 and a rotor side supply passage 15 are formed in a state where a supply passage inner surface side is separated from a metal part by coating supply passage lower holes provided on metallic floating sheet 2a and a rotor 3a with fluororesin. It is possible to supply abrasive liquid and pure water through a rotary joint 1A without mixing metal ions on the rotating side from the fixed side. As the floating sheet and the rotor are formed of metal, it is possible to prevent attachment of a foreign matter damaging mirror- like finishing of super high precision and to improve durability.</p> |
